APS DIVISION

EUV Solution

  • EUV Pellicle Mounter/Demounter System
  • EUV Pellicle Inspection System
  • EUV POD Inspection System
  • EUV Source Generation System
EUV Pellicle Mounter/Demounter System
  • EUV Pellicle Mounter/Demounter System
  • EUV Pellicle Inspection System
  • EUV POD Inspection System
  • EUV Source Generation System
EPMD: EUV Pellicle Mounter / Demounter
Fully Automated EUV Pellicle Mounting and Demounting System
  • Full automation: Support high throughput & small footprint
  • Precise process control: Glue quantity, Heat temperature & Pressure, etc.
  • Multiple prevention modules for the rupture of EUV Pellicle