APS DIVISION
EUV Solution
- EUV Pellicle Mounter/Demounter System
- EUV Pellicle Inspection System
- EUV POD Inspection System
- EUV Source Generation System
EUV Pellicle Mounter/Demounter System
- EUV Pellicle Mounter/Demounter System
- EUV Pellicle Inspection System
- EUV POD Inspection System
- EUV Source Generation System
EPMD: EUV Pellicle Mounter / Demounter
Fully Automated EUV Pellicle Mounting and Demounting System
- Full automation: Support high throughput & small footprint
- Precise process control: Glue quantity, Heat temperature & Pressure, etc.
- Multiple prevention modules for the rupture of EUV Pellicle