APS DIVISION

APS Overview

FST’s APS Division specializes in the development and commercialization of advanced equipment for EUV lithography.
Since 2010, the division has been delivering essential EUV infrastructure tools and inspection systems required for next-generation semiconductor manufacturing.
By combining continuous R&D with close collaboration with customers, APS is evolving into a total EUV solution provider—meeting the growing complexity of industry demands.
R&D Technology
Process control
  • Quantity, temperature and pressure control
  • EUV Pellicle rupture prevention & monitoring
  • Automation solution
EUV Generation
  • Excellent coherence & low divergence (laser-like)
  • HHG: High order Harmonic Generation
  • LPP: Laser Produced Plasma
  • Table top scale footprint
Inspection & Measurement
Technologies
  • Through Pellicle Inspection
  • Die to Die Algorithm
  • Auto Defect Review & Classification

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