APS DIVISION
Introduction
The FST APS division, specializing in advanced product and solutions development,has been at the forefront of EUV infra tool development since 2010, starting with the EUV source.
R&D Technology
Process control
- Quantity, temperature and pressure control
- EUV Pellicle rupture prevention & monitoring
- Automation solution
EUV Generation
- Excellent coherence & low divergence (laser-like)
- HHG: High order Harmonic Generation
- LPP: Laser Produced Plasma
- Table top scale footprint
Inspection & Measurement
Technologies
Technologies
- Through Pellicle Inspection
- Die to Die Algorithm
- Auto Defect Review & Classification
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