사업분야
차별화된 기술력과 창조적인 사고 더 큰 도약을 위한 도전은 계속됩니다.
APS 사업부
EUV Solution
- EUV Pellicle Mounting/Demounting System
- EUV Pellicle Inspection System
- EUV POD Inspection System
- EUV Source Generation System
EUV Pellicle Mounting/Demounting System
- EUV Pellicle Mounting/Demounting System
- EUV Pellicle Inspection System
- EUV POD Inspection System
- EUV Source Generation System
EUV Pellicle Mounting / Demounting System
The World's First Fully Automated EUV Pellicle Mounter & Demounter
- Full automation: Fully automated & connected
- Cleanliness ISO 1
- Can be integrated with FST’s EUV pellicle inspection system
- Consists of SFU (Stud Fixation Unit), MDU (Mounting/Demounting Unit),
SRU (Stud Removal Unit), and AMHS (Automated Material Handling System)
EUV Pellicle Inspection System
EUV Pellicle Inspection System applied with Cutting-edge Technology
- EUV pellicle incoming quality control & lifetime verification
- Measurement accuracy ( ±20%, >1um, membrane)
- Auto defect review
- Clean & safe handling
- Non-flip inspection & review
EUV POD Inspection System
Various optimized inspection functions for EUV inner pod
- Dark field/bright field inspection optics
- Defective plating detection
- Distance measurement pin to pin
- N2 blowing & suction: developed to remove particles
- Constant monitor of pod usage status
EUV Source Generation System
High-order Harmonic Generation driven by ultra-fast laser
- Excellent coherence
- Low divergence
- Table-top size footprint
- Tunable wavelength
Application
- Mask defect review system
- EUV transmittance/reflectance measurement system
- EUV interferometer
- Coherent scattering microscopy
Top