600 slm

4 / 6 port

All processes including PFCs gas

Toxic/acidic gas decomposition using ultra-high temperature “10,000K Plasma Arc”
(PFCs decomposition)

Water soluble gas removal using Wet zone

Exhaust gas cooling function using Wet zone

Automation system through PLC control

Auto By-pass function

Fire detecting through smoke detecting

External cooling of the chamber using PCW

Water leak detection function

FINE100 series : 100 slm

FINE200 series : 200 slm

FINE1000CS : 50,000 slm

1 port

Ion Implantation, Plasma Etch, ALD, CVD, Photovoltaics, MOCVD

Toxic gas removal based on physicochemical reation (within TLV)

Core technology of Dry SCR’ = “RESIN”

High efficiency & lifetime of RESIN (Depend on Process)

Powder control function

Automation system through PLC control

Auto By-pass function (Application of Mini-Absorber)

600 slm

4 / 6 port

Some PFCs gas can be removed (NF3)

CVD, Diffusion, etc.

Toxic gas decomposition using high heat and strong energy (radicals) through LNG (CH4)
“Combustion reaction”

Water soluble gas removal using Wet zone

Exhaust gas cooling function using Wet zone

Automation system through PLC control

Auto By-pass function

Fire detecting through smoke detecting

External cooling of the chamber using PCW

Water leak detection function

LNG (CH4) detection function

600 slm

4 / 6 port

CVD, LPCVD, Diffusion, etc.

Gas removal through thermal decomposition and oxidation using a high-temperature heater

Water soluble gas removal using Wet zone

Exhaust gas cooling function using Wet zone

Powder control function

Automation system through PLC control

Auto By-pass function

Fire detecting through smoke detection

External cooling of the chamber using PCW

Water leak detection function