사업분야
차별화된 기술력과 창조적인 사고 더 큰 도약을 위한 도전은 계속됩니다.
펠리클사업부
반도체 펠리클
-
EUV Pellicle - Under Development
-
ArF Immersion(193nm)
Transmittance at WavelengthItem Transmittance (%) 193nm 248nm 365nm Perfluoropolymer Perfluoropolymer Thickness 0.28㎛ Transmittance ≥ 99.0% (at 193nm), ≥ 99.0% (at 248nm), ≥ 99.0% (at 365nm) Uniformity of TR ≤ 0.1% Transmittance Spectrum 
-
ArF (193nm)
Transmittance at WavelengthItem Transmittance (%) 193nm 248nm 365nm Material Perfluoropolymer Thickness 0.84㎛ Transmittance ≥ 99.0% (at 193nm) Uniformity of TR ≤ 0.3% Transmittance Spectrum 
-
KrF(248nm) Transmittance
at WavelengthItem Transmittance (%) 193nm 248nm 365nm Material Perfluoropolymer Thickness 0.82㎛ Transmittance ≥ 99.0% (at 248nm) ≥ 99.0% (at 365nm) Uniformity of TR ≤ 0.4% Transmittance Spectrum 
-
G&I (365 & 436nm) Transmittance
at WavelengthItem Transmittance (%) 248nm 365nm 436nm Material Cellulose & Perfluoropolymer Thickness 1.44㎛ Transmittance ≥ 99.0% (at 365nm), ≥ 99.0% (at 436nm) Uniformity of TR ≤ 0.5% Transmittance Spectrum 
Top