R&D CENTER

Introduction

In addition to FST's legacy businesses - pellicle and temperature control units,
FST's Tech Center develops next-generation technologies to prepare for the future.
In collaboration with various institutions, we focus on technologies related to infrastructure tools and modules needed for EUV lithography.
By providing cutting-edge EUV solutions to our customers, we will strive to become the world's renowned EUV solution provider.
R&D Technology
EUV Infrastructure
  • EUV Pellicle Mount/Demount
  • EUV Pellicle inspection
  • EUV POD inspedtion/measurement
  • EUV (13.5nm) wavelength light source
Inspection Technology
  • Mask Handling
  • Mask/Pellicle inspection
  • Corner inspection
  • Automatic review
  • Particle removal
Display Analysis Technology
  • Defect material analysis
  • Process monitoring
  • Noncontact, nondestructive analysis

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