사업분야
차별화된 기술력과 창조적인 사고 더 큰 도약을 위한 도전은 계속됩니다.
APS 사업부
DUV Solution
- MERCURY (Optical Pellicle & Mask Inspection System)
- ArF,KrF Pellicle Inspection System (PRIME Series)
MERCURY (Optical Pellicle & Mask Inspection System)
- MERCURY (Optical Pellicle & Mask Inspection System)
- ArF,KrF Pellicle Inspection System (PRIME Series)
MERCURY (Optical Pellicle & Mask Inspection System)
MERCURY (Optical Pellicle & Mask Inspection System)
- Low cost of ownership (minimized consumable parts)
- Pellicle / mask inspection (mask chamfer and side)
- User-friendly recipe creation
-
A.D.R (Automatic Defect Review)
- Automatic review function
- Discern whether particle is located front/back side of the membrane
ArF,KrF Pellicle Inspection System (PRIME Series )
- Particle inspection
- Patented algorithm for accurate detection
- Full area inspection on membrane
- A.D.R (Automatic Defect Review)
- Automatic review function
- Discern whether particle is located front/back side of the membrane
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