사업분야

차별화된 기술력과 창조적인 사고 더 큰 도약을 위한 도전은 계속됩니다.

기술연구소

DUV Solution

  • MERCURY (Optical Pellicle & Mask Inspection System)
  • ArF,KrF Pellicle Inspection System (PRIME Series)
MERCURY (Optical Pellicle & Mask Inspection System)
  • MERCURY (Optical Pellicle & Mask Inspection System)
  • ArF,KrF Pellicle Inspection System (PRIME Series)
MERCURY (Optical Pellicle & Mask Inspection System)
MERCURY (Optical Pellicle & Mask Inspection System)
  • Low cost of ownership (minimized consumable parts)
  • Pellicle / mask inspection (mask chamfer and side)
  • User-friendly recipe creation
  • A.D.R (Automatic Defect Review)
    • Automatic review function
    • Discern whether particle is located front/back side of the membrane
ArF,KrF Pellicle Inspection System (PRIME Series )
  • Particle inspection
  • Patented algorithm for accurate detection
  • Full area inspection on membrane
  • A.D.R (Automatic Defect Review)
    • Automatic review function
    • Discern whether particle is located front/back side of the membrane

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