사업분야

차별화된 기술력과 창조적인 사고 더 큰 도약을 위한 도전은 계속됩니다.

기술연구소

EUV Solution

  • EUV Pellicle Mounting/Demounting System
  • EUV Pellicle Inspection System
  • EUV POD Inspection System
  • EUV Source Generation System
EUV Pellicle Mounting/Demounting System
  • EUV Pellicle Mounting/Demounting System
  • EUV Pellicle Inspection System
  • EUV POD Inspection System
  • EUV Source Generation System
EUV Pellicle Mounting / Demounting System
The World's First Fully Automated EUV Pellicle Mounter & Demounter
  • Full automation: Fully automated & connected
  • Cleanliness ISO 1
  • Can be integrated with FST’s EUV pellicle inspection system
  • Consists of SFU (Stud Fixation Unit), MDU (Mounting/Demounting Unit),
    SRU (Stud Removal Unit), and AMHS (Automated Material Handling System)
EUV Pellicle Inspection System
EUV Pellicle Inspection System applied with Cutting-edge Technology
  • EUV pellicle incoming quality control & lifetime verification
  • Measurement accuracy ( ±20%, >1um, membrane)
  • Auto defect review
  • Clean & safe handling
  • Non-flip inspection & review
EUV POD Inspection System
Various optimized inspection functions for EUV inner pod
  • Dark field/bright field inspection optics
  • Defective plating detection
  • Distance measurement pin to pin
  • N2 blowing & suction: developed to remove particles
  • Constant monitor of pod usage status
EUV Source Generation System
High-order Harmonic Generation driven by ultra-fast laser
  • Excellent coherence
  • Low divergence
  • Table-top size footprint
  • Tunable wavelength
Application
  • Mask defect review system
  • EUV transmittance/reflectance measurement system
  • EUV interferometer
  • Coherent scattering microscopy

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