사업분야
차별화된 기술력과 창조적인 사고 더 큰 도약을 위한 도전은 계속됩니다.
TCU 사업부
Scrubber Product Line-up
- Plasma-Wet Scrubber
- Dry Scrubber
- Burn-Wet Scrubber
- Heat-Wet Scrubber
- Plasma-Wet Scrubber
- Dry Scrubber
- Burn-Wet Scrubber
- Heat-Wet Scrubber
Plasma-Wet Scrubber
FINE600PE, FINE600PE_Dual, FINE1200PE_Dual
- Capacity
-
FINE600PE : 600 slm
-
FINE600PE_Dual : 600 slm
-
FINE1200PE_Dual : 1,200 slm
- Inlet port
-
1 / 4 / 6 port
- Process application
-
FINE600PE series : All processes including PFCs gas
-
FINE1200PE series : All processes not including PFCs gas
- Key Feature
-
Toxic/Acid gas decomposition using ultra-high temperature “10,000K Plasma Arc“ (PFCs decomposition)
-
Combustion of flammable gases using Arc plasma
- Wet scrubbing
-
Water soluble gas removal using Wet zone
-
Exhaust gas cooling function using Wet zone
- Safety
-
Automation system through PLC control
-
Auto By-pass function
-
Fire detecting through smoke detecting
-
External cooling of the chamber using PCW
-
Water leak detection function
Dry Scrubber
FINE100CE, FINE100CS, FINE100CE_Dual, FINE200CE, FINE200CS, FINE200CE_Dual, FINE1000CS
- Capacity
-
FINE100 series : 100 slm
-
FINE200 series : 200 slm
-
FINE1000CS : 50,000 slm
- Inlet port
-
1 port
- Process application
-
Ion Implant, Plasma Etch, ALD, CVD, Photovoltaics, MOCVD
- Key Feature
-
Toxic gas removal based on phyicochemical reaction (within TLV)
-
Core technology of Dry scrubber = “RESIN“
-
High efficiency & lifetime of RESIN (Depend on Process)
- Safety
-
Automation system through PLC control
-
Auto By-pass function (Application of Mini-Absorber)
-
Powder control function
Burn-Wet Scrubber
FINE600BE, FINE600BE_Dual, FINE1500BE
- Capacity
-
FINE600BE : 600 slm
-
FINE600BE_Dual : 600 slm
-
FINE1500BE : 1,500 slm
- Inlet port
-
4 / 6 port
- Process application
-
Some PFCs gas can be removed (NF3)
-
CVD, Diffusion, etc
- Key Feature
-
Toxic gas decomposition using high and strong energy (radicals) through LNG(CH4)
-
Combustion reaction
- Wet scrubbing
-
Water soluble gas removal using Wet zone
-
Exhaust gas cooling function using Wet zone
- Safety
-
Automation system through PLC control
-
Auto By-pass function
-
Fire detecting through smoke detecting
-
External cooling of the chamber using PCW
-
Water leak detection function
-
LNG(CH4) detection function
Heat-Wet Scrubber
FINE600HS, FINE600HS_Dual
- Capacity
-
600 slm
- Inlet port
-
4 / 6 port
- Process application
-
CVD, LPCVD, Diffusion, etc.
- Key Feature
-
Gas removal through termal decomposition and oxidation using a high temperature heater
- Wet scrubbing
-
Water soluble gas removal using Wet zone
-
Exhaust gas cooling function using Wet zone
- Safety
-
Automation system through PLC control
-
Auto By-pass function
-
Fire detecting through smoke detecting
-
External cooling of the chamber using PCW
-
Water leak detection function
-
Powder control function
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