Semiconductor Pellicle

  • EUV Pellicle - Under Developing
  • ArF Immersion(193nm)
    Transmittance at Wavelength
    Item Transmittance (%)
    193nm 248nm 365nm
    Perfluoropolymer Perfltuoropolymer
    Thickness 0.28㎛
    Transmittance ≥ 99.0% (at 193nm), ≥ 99.0% (at 248nm), ≥ 99.0% (at 365nm)
    Uniformity of TR ≤ 0.1%
    Transmittance Spectrum
  • ArF (193nm)
    Transmittance at Wavelength
    Item Transmittance (%)
    193nm 248nm 365nm
    Material Perfluoropolymer
    Thickness 0.84㎛
    Transmittance ≥ 99.0% (at 193nm)
    Uniformity of TR ≤ 0.3%
    Transmittance Spectrum
  • KrF(248nm) Transmittance
    at Wavelength
    Item Transmittance (%)
    193nm 248nm 365nm
    Material Perfluoropolymer
    Thickness 0.82㎛
    Transmittance ≥ 99.0% (at 248nm) ≥ 99.0% (at 365nm)
    Uniformity of TR ≤ 0.4%
    Transmittance Spectrum
  • G&I (365 & 436nm) Transmittance
    at Wavelength
    Item Transmittance (%)
    248nm 365nm 436nm
    Material Cellulose & Perfluoropolymer
    Thickness 1.44㎛
    Transmittance ≥ 99.0% (at 365nm), ≥ 99.0% (at 436nm)
    Uniformity of TR ≤ 0.5%
    Transmittance Spectrum

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