THC Type

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Temperrature & Humldlty Control Unlt

THC

THC

THC

  • High performance for photoresist uniformity
  • Wide applicability & Compact foot-print
  • No demand for maintenance, leak free
  • Precise accuracy & stability
  • Touch screen display for intuitive programming and use
  • All stainless steel appearance
  • Design under SEMI-S2-0200
  • Applications include photoresist coat, photo-develop
    stations and other process