Chiller?

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chiller

chiller

chiller

The Chiller of FST is an equipment that improves process efficiencies by constantly maintaining inside-chamber wafer and its surrounding temperatures, through the excessive heat produced in semiconductor etching process.
As the process becomes more micro and solid, continuous development of Chiller is requested for more customized equipment supply. Accordingly, products of various fundamental technology and design technology basis are being manufactured.
The electric Chiller of FST using thermo-electric cooling and the refrigerant Chiller using refrigerating machine have been applied to world-renowned semiconductor equipment, and its reliability has been approved. In addition, temperature-humidity controller applied for coater equipment of photo process can be called the fruits of FST technologies.
The next generation etching equipment require the following four points: multi-functionality, cost reduction, automation and environmental treatment. To satisfy these conditions, the strategy of peripheral equipment (Chiller) is the supply of products with integrated small-size, low power consumption, super functions, etc.

FST is concentrating on manufacturing of visualized products in process
sides, based on knowledge basis and various technologies such as cooling
and electric Chillers, temperature and humidity controllers (THC), etc.