EUVO light generation

사업분야 기술연구소 EUVO™

EUV light generation

EUV

극자외선 발진 시스템 (EUV Generation Technology)

EUVO™은 EUV Metrology Application에 적합한 안정적이고
밝은 EUV Light를 제공하는 세계최고 품질의 EUV Infrastructure용
Light Source입니다.

EUVO™소개 동영상 (더블클릭 하시면 전체화면으로 보실 수 있습니다.)


Key feature & Benefit
  • Field proven specification
  • Fast generating EUV light
  • Automated beam align system
  • High brightness & low divergence beam
  • Beam position maintaining system
  • Table top scale system
  • No debris
Specification
  • Wavelength : 13.5nm
  • Radiation power > 70nW
  • Repetition : 1kHz
  • Divergence < 0.25mrad
  • Brightness > 200 W/mm²/sr
  • Spectral bandwidth : λ/Δλ >280
  • Shot-to-shot energy stability : σ = 2.3%
  • EUV Wavefront < λEUV/40
  • Pulse width < 50fs
  • Source position stability : σx,y = 1.2 μm
  • Range < 4.3 μm
Application
  • EUV Metrology & Inspection System
  • - EUV Reflectometer
  • - EUV Interferometer
  • - Defect review system
  • EUV parts performance test system
  • - EUV PR
  • - EUV Optics