APS DIVISION
In addition to our leading products, such as the pellicle and chiller, FST is striving to develop element technologies to prepare for the future. We especially focus on securing technologies related to laser application technology and optic-based inspection/measurement. Through the research of the following element technologies, our technology research center is playing an incubating role for the commercialization of each R&D item.
R&D Technology
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EUV light source
manufacturing technologyFemto-second laser operation technology
Light source fabrication technology of EUV (13.5nm) wavelength
Laser and EUV optical system operating technology
Vacuum technology
Used for EUV mask inspection and microscopy
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Fine line width
measurement technologyHigh-resolution optical system
Fast auto focus function
Stable measurement algorithm
Fast and accurate stage motion
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Laser Cutting /
Annealing technologyHigh performance laser optical system
Stable laser beam control
Wafer and Glass Cutting / Annealing
Minimization of sample damage by heat
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Semiconductor photomask
inspection technologyMASK Handling technology
Mask / Pellicle inspection
Round inspection technology (motion / camera synchronization technology)
Profiling technology using Confocal
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High performance
Dicing Saw technologyPrecision stage production technology
Simple and convenient operation UI program
Automatic Aligning without pattern registration
Kerf automatic calibration and cutting technology
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